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MicroXAM 100 Optical Surface Profiler-KLA Tencor

MicroXAM-1200 Optical Surface Profiler



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The MicroXAM is an optical surface profiler that supports a wide range of surface topography applications.

The system enables measurement of step heights for complex MEMS structures, quantificationof surface texture of biomedical devices, and control of laser texture bump profiles on hard drive disk media.

Repeatable measurements of step heights from a nanometer (.001 micron, or 10 Å) up to 10.3 millimeters

Complete 3D surface profiling measurements. Proprietary software allows stitching of multiple images for macro-analysis, and calculation of 2D and 3D surface parameters such as volume and area differences.

Features


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