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P-17 surface profiler-KLA Tencor

KLA Tencor - P-17
Discover the new profiler generation !


The P-17 stylus profiler offers industry leading surface measurement repeatability for reliable measurement performance.  The surface measurement tool has 200 mm scan length standard - the only stylus profiler on the market to offer long scan capability without the need for stitching.  The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a  surface measurement tool.  The P-17 stylus profiler includes many features to enhance the user experience such as top and side view optics, and motorized theta/leveling stages.  Finally, the surface measurement tool includes point-and-click operation and the productivity package to offer the easiest to use  measurement tool on the market with the features required by university, R&D, and production environments.

The P-17 OF (open frame) includes all of the capability of the P-17 stylus profiler, but allows the user to load larger samples on the 9.5 by 9.5-inch square stage or 300 mm sample chuck.


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