Reflectometers Adaptable to microscope
F40
1. Spot as small as 1 micron
2. Connection to the simple microscope
3. Precise monitoring of the measuring point
4. Wide measuring range
The F40 comes with an integrated color video camera which allows precise monitoring of the film thickness measurement point. Thickness and index can be measured in less than a second. Like all of our table film thickness measuring instruments, the F40 connects to the USB port on your Windows® computer and installs in minutes.
Applications
- Semiconductor manufacturing
- Photosensitive resin
- Oxides / nitrides
- Si and other semiconductor films
- Photosensitive resin
- Mems
- photoresist
- Silicon membranes
- AIN / ZnO thin film filters
- photoresist
- Biomedical devices
- Polymer / parylene layers
- Wall thickness of membrane / balloon
- Drug coating on implants
- Polymer / parylene layers
- Liquid crystal display
- Cellular deficiencies
- Polyamide
- ITO
- Cellular deficiencies
More info on applications
- Dielectric
- Hard thickness
- IC failure analysis
- ITO and other TCO
- Medical equipement
- Metal thickness
- Microfluidics
- OLED
- Ophthalmic coatings
- Parylene Coatings
- Photoresist
- Porous silicon
- Treatment films
- Refractive index & k
- Wafers and membranes of silicon
- Solar applications
- Semiconductor teaching laboratories
- Roughness and surface finish
Ideal for measuring ultra-thin patterns or films
What's included
- Integrated spectrometer / light source
- FILMeasure 8 software
- FILMeasure standalone software for remote data analysis
- MA-Cmount microscope adapter with Cmount connection
- Fiber optic patch cable
- BK7 reflectance standard
- TS-Focus-SiO2-4-10000 standard / standard thickness
- BG-Microscope to take the reference base
Additional benefits
- Library with more than 130 materials included with each system, with access to 100 others
- Application engineers available for immediate 24 hour assistance (Monday to Friday)
- "Hands On" online support
- Hardware upgrade program
ADVANTAGES
- Spot as small as 1 micron
- Connection to simple microscope
- Precise monitoring of the measuring point
- Wide measurement range
Accessories
SS-Microscope-EXR-1
SS-Microscope-EXR-1
StageBase-XY10-Auto-100mm
NIST-traceable thickness standard
Multi-value thickness standard
Specifications
Model Specifications
| Model | Thickness Range* | Wavelength Range |
|---|---|---|
| F40 | 20nm - 40µm | 400-850nm |
| F40-UV | 4nm - 40µm | 190-1100nm |
| F40-EXR | 20nm - 150µm | 400-1700nm |
| F40-NIR | 100nm - 120µm | 950-1700nm |
| F40-UVX | 4nm - 120µm | 190-1700nm |
| F40-XT | 0.4µm - 250µm | 1440-1690nm |
*film stack dependent
Thickness Range*
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