Automated thin-film thickness mapping
F50
2. Sample up to 450mm in diameter
3. Many card models
4. Customizable
5. Automated
The Filmetrics F50 family of products can map film thickness as quickly as two dots per second. A motorized R-Theta stage accepts standard and personalized mandrels for samples up to 450 mm in diameter. (It's the same long-lived stage that performs millions of measurements in our production systems!)
Map models can be polar, rectangular or linear, or you can create your own without limiting the number of measurement points. Dozens of predefined card models are provided.
The F50 film thickness mapping system connects to the USB port on your Windows® computer and can be set up in minutes.
The different F50 instruments are distinguished mainly by the thickness and the wavelength range. The F50 standard is the most popular. Generally shorter wavelengths (for example, F50-UV) are required to measure thinner films, while longer wavelengths are used to measure thicker, rougher and more opaque films.
- F54 Serie: Fine spot size - sample up to 450mm in diameter - R&D. More information >
- F54-XY-200mm Serie: Acoustic protection cover - Production. More information >
- F60 Serie: High automation - notch detection - SECS / GEM interface. More information >
Applications
- Semiconductor manufacturing
- photoresist
- Oxides / nitrides / SOI
- wafer
- photoresist
- Mems
- photoresist
- Silicon membranes
- photoresist
- Biomedical devices
- Hardness coating
- Anti-reflective coating
- Hardness coating
- Liquid crystal display
- Cellular deficiencies
- Polyamide
- ITO
- Cellular deficiencies
More info on applications
- Dielectric
- Hard thickness
- IC failure analysis
- ITO and other TCO
- Medical equipement
- Metal thickness
- Microfluidics
- OLED
- Ophthalmic coatings
- Parylene Coatings
- Photoresist
- Porous silicon
- Treatment films
- Refractive index & k
- Wafers and membranes of silicon
- Solar applications
- Semiconductor teaching laboratories
- Roughness and surface finish
Customizable thickness mapping up to 300mm
- Integrated spectrometer / light source
fiber optic cable
- Reflectance standards for 4 ", 6" and 200 mm sections
- TS-SiO2-4-7200 Thickness standard
- BK7 reflectance standard
- Flattening filter (for highly reflective substrates)
- Vacuum pump
- Replacement lamp TH-1
Additional benefits
- Library with more than 130 materials included with each system, with access to 100 others
- Application engineers available for immediate 24 hour assistance (Monday to Friday)
- "Hands On" online support
- Hardware upgrade program
ADVANTAGES
- Quick mapping
- Sample up to 450mm in diameter
- Many card models
- Customizable
- Automated
Accessories
NIST-traceable thickness standard
F50 chuck - 100mm, 200mm, 300mm & 450mm
F50 small spot option, VIS-UV
Specifications
Model Specifications
| Model | Thickness Range* | Wavelength Range |
|---|---|---|
| F50 | 20nm - 70µm | 380-1050nm |
| F50-UV | 5nm - 40µm | 190-1100nm |
| F50-NIR | 100nm - 250µm | 950-1700nm |
| F50-EXR | 20nm - 250µm | 380-1700nm |
| F50-UVX | 5nm - 250µm | 190-1700nm |
| F50-XT | 0.2µm - 450µm | 1440-1690nm |
| F50-s980 | 4µm - 1mm | 960-1000nm |
| F50-s1310 | 7µm - 2mm | 1280-1340nm |
| F50-s1550 | 10µm - 3mm | 1520-1580nm |
*film stack dependent
Thickness Range*
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